Wet Etching

Plain Wafer holders, holders with optical inspection and etching baths

Wafer holder

single series

Wafer holders for a single wafer with backside protection

tandem series

Unique wafer holders for two wafers mounted face-to-face

single OW

Wafer holder for single sided etching with an optical backside window

single IL

Unique wafer holders with built-in backside illumination

single chip

Special custom-made holders for single chips

 

Wet Etching: Single OW

Wafer holder for single sided etching with an optical backside window.

The Single OW wafer holders features a transparent back side for optical inspection without additional illumination. Pyrex glass is used for KOH- and TMAH-etching, sapphire windows for HF. Please note that the OW series holds only a single wafer.

Documentation and
Downloads

For more information, please download our product info below.

For a complete list of our product information sheets please see our Documentation Download Section.