Wet Etching

Plain Wafer holders, holders with optical inspection and etching baths

Wafer holder

single series

Wafer holders for a single wafer with backside protection

tandem series

Unique wafer holders for two wafers mounted face-to-face

single OW

Wafer holder for single sided etching with an optical backside window

single IL

Unique wafer holders with built-in backside illumination

single chip

Special custom-made holders for single chips

 

Wet Etching: Single IL

Wafer holder for single sided etching with internal illumination.

A unique feature of the Single-IL type is an integrated halogen lamp or LED array for optical inspection of the membrane thickness. Silicon membranes of about 22 µm and less are optically transmissive and appear in different shades of brown depending on their thickness. The backside illumination feature is a helpful tool to overcome some of the shortcomings of time based etch-stop techniques.

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Documentation and
Downloads

For more information, please download our product info below.

For a complete list of our product information sheets please see our Documentation Download Section.