Wet Etching

Plain Wafer holders, holders with optical inspection and etching baths

Etch-Stop (ECES)

Wafer holders with electrical contacts and dedicated potentiostats


Wafer Holder with front-side contacts and Electroplating Systems

Porous Silicon

Complete wet etching system for porous silicon formation

HF vapor etcher

Sticking free and dry silicon oxide removal

Customer specific

A few examples for our engineering an development capabilities


Our primary focus is the development of reliable tools, smart instruments, and systems for silicon micromachining. To this end we take full advantage of our inside knowledge of the demands of MEMS engineers, and provide reliable all-in-one solutions for both research and industry.

AMMT's tools and systems are designed by MEMS engineers for MEMS engineers.